Simple Technology for Bulk Accelerometer Based on Bond and Etch Back Silicon on Insulator Wafers

J.A. Plaza, J. Esteve, E. Lora-Tamayo

    Research output: Contribution to journalArticleResearch

    22 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)299-302
    JournalSens. actuators, A, Phys.
    Volume68
    Issue number1-3
    Publication statusPublished - 1 Jan 1998

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