SiGe nanowire arrays based thermoelectric microgenerator

Inci Domnez Noyan, Gerard Gadea, Marc Salleras, Merce Pacios, Carlos Calaza, Andrej Stranz, Marc Dolcet, Alex Morata, Albert Tarancon, Luis Fonseca

    Research output: Contribution to journalArticleResearch

    37 Citations (Scopus)


    © 2018 Thermoelectric micro/nanogenerators (µTEGs) are potential candidates as energy harvesters to power IoT sensors. This study reports on a thermoelectric micro/nanogenerator with a planar architecture built by silicon micromachining technologies that uses silicon-germanium (SiGe) nanowire (NW) arrays as thermoelectric material. The growth of bottom-up NW arrays by means of Chemical Vapour Deposition - Vapour Liquid Solid growth (CVD-VLS) and their monolithic integration into prefabricated microplatforms are presented. It is shown that SiGe NWs based µTEGs can harvest 7.1 μW/cm2 without any additional heat exchanger, when there is a waste heat source available at a temperature of 200 °C. Since the required power density for many sensing applications is in the range of 10–100 μW/cm2 the results obtained in this work are close to meet expectations.
    Original languageEnglish
    Pages (from-to)492-499
    JournalNano Energy
    Publication statusPublished - 1 Mar 2019


    • Energy harvesting
    • MEMS
    • SiGe nanowires
    • Thermoelectric micro/nanogenerator
    • VLS-CVD


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