SiC on SOI resonators: a route for electrically driven MEMS in harsh environment

M. Placidi, A. Pérez-Tomás, P. Godignon, N. Mestres, G. Abadal, T. Chassagne, M. Zielinski

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Cite this

@article{a4d3e64a136e4339bc7c4de9490e4571,

title = "SiC on SOI resonators: a route for electrically driven MEMS in harsh environment",

author = "M. Placidi and A. P{\'e}rez-Tom{\'a}s and P. Godignon and N. Mestres and G. Abadal and T. Chassagne and M. Zielinski",

year = "2010",

month = jan,

day = "1",

language = "English",

volume = "645-648",

pages = "845--848",

journal = "Materials Science Forum",

issn = "0255-5476",

}

TY - JOUR

T1 - SiC on SOI resonators: a route for electrically driven MEMS in harsh environment

AU - Placidi, M.

AU - Pérez-Tomás, A.

AU - Godignon, P.

AU - Mestres, N.

AU - Abadal, G.

AU - Chassagne, T.

AU - Zielinski, M.

PY - 2010/1/1

Y1 - 2010/1/1

M3 - Article

SN - 0255-5476

VL - 645-648

SP - 845

EP - 848

JO - Materials Science Forum

JF - Materials Science Forum

ER -