SiC on SOI resonators: a route for electrically driven MEMS in harsh environment

M. Placidi, A. Pérez-Tomás, P. Godignon, N. Mestres, G. Abadal, T. Chassagne, M. Zielinski

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)845-848
JournalMaterials Science Forum
Volume645-648
Publication statusPublished - 1 Jan 2010

Cite this

Placidi, M., Pérez-Tomás, A., Godignon, P., Mestres, N., Abadal, G., Chassagne, T., & Zielinski, M. (2010). SiC on SOI resonators: a route for electrically driven MEMS in harsh environment. Materials Science Forum, 645-648, 845-848.