SiC Freestanding micromechanical structures on silicon-on-insulator substrates

M. Placidi, M. Zielinski, G. Abadal, J. Montserrat, P. Godignon

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)617-620
JournalMaterials Science Forum
Volume615-617
DOIs
Publication statusPublished - 1 Jan 2009

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