Second order effects of aspect ratio variations in high sensitivity grating couplers

N. Darwish, L. Diéguez, M. Moreno, F.J. Muñoz, R. Mas, J. Mas, J. Samitier, B. Nilsson, G. Petersson

Research output: Contribution to journalArticleResearch

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)1775-1778
JournalMicroelectronic Engineering
Volume84
Publication statusPublished - 1 Jan 2007

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