Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements

F. Pérez-Murano; N. Barniol; J. Masó; L. Fonseca; X. Aymerich

Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements

F. Pérez-Murano, N. Barniol, J. Masó, L. Fonseca, X. Aymerich

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	Defect recognition and image processing in semiconductors and devices: proceedings of the 5th International Conference, Santander, Spain, sept. 1993
Editors	Jiménez, J.
Place of Publication	Bristol (GB)
Pages	81-84
Number of pages	3
Volume	135
Edition	1
Publication status	Published - 1 Jan 1994

Publication series

Name	Institute of Physics, Conference series

Cite this

Pérez-Murano, F., Barniol, N., Masó, J., Fonseca, L., & Aymerich, X. (1994). Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements. In Jiménez, J. (Ed.), Defect recognition and image processing in semiconductors and devices: proceedings of the 5th International Conference, Santander, Spain, sept. 1993 (1 ed., Vol. 135, pp. 81-84). (Institute of Physics, Conference series)..

Pérez-Murano, F. ; Barniol, N. ; Masó, J. et al. / Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements. Defect recognition and image processing in semiconductors and devices: proceedings of the 5th International Conference, Santander, Spain, sept. 1993. editor / Jiménez, J. Vol. 135 1. ed. Bristol (GB), 1994. pp. 81-84 (Institute of Physics, Conference series).

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title = "Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements",

author = "F. P{\'e}rez-Murano and N. Barniol and J. Mas{\'o} and L. Fonseca and X. Aymerich",

year = "1994",

month = jan,

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booktitle = "Defect recognition and image processing in semiconductors and devices: proceedings of the 5th International Conference, Santander, Spain, sept. 1993",

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Pérez-Murano, F, Barniol, N, Masó, J, Fonseca, L & Aymerich, X 1994, Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements. in Jiménez, J. (ed.), Defect recognition and image processing in semiconductors and devices: proceedings of the 5th International Conference, Santander, Spain, sept. 1993. 1 edn, vol. 135, Institute of Physics, Conference series, Bristol (GB), pp. 81-84.

Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements. / Pérez-Murano, F.; Barniol, N.; Masó, J. et al.
Defect recognition and image processing in semiconductors and devices: proceedings of the 5th International Conference, Santander, Spain, sept. 1993. ed. / Jiménez, J. Vol. 135 1. ed. Bristol (GB), 1994. p. 81-84 (Institute of Physics, Conference series).

Research output: Chapter in Book › Chapter › Research

TY - CHAP

T1 - Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements

AU - Pérez-Murano, F.

AU - Barniol, N.

AU - Masó, J.

AU - Fonseca, L.

AU - Aymerich, X.

PY - 1994/1/1

Y1 - 1994/1/1

M3 - Chapter

SN - 978-0-7503-0294-4

VL - 135

T3 - Institute of Physics, Conference series

SP - 81

EP - 84

BT - Defect recognition and image processing in semiconductors and devices: proceedings of the 5th International Conference, Santander, Spain, sept. 1993

A2 - Jiménez, J., null

CY - Bristol (GB)

ER -

Pérez-Murano F, Barniol N, Masó J, Fonseca L, Aymerich X. Scanning tunneling microscopy of silicon surfaces: recognition of surface contamination and roughness measurements. In Jiménez, J., editor, Defect recognition and image processing in semiconductors and devices: proceedings of the 5th International Conference, Santander, Spain, sept. 1993. 1 ed. Vol. 135. Bristol (GB). 1994. p. 81-84. (Institute of Physics, Conference series).