| Original language | English |
|---|---|
| Pages (from-to) | 1419-1423 |
| Journal | Solid-state electronics |
| Volume | 33 |
| Issue number | 11 |
| Publication status | Published - 1 Jan 1990 |
RIE induced damage in MOS structures
A. de Dios, E. Castán, L. Bailón, J. Barbolla, M. Lozano, LORA TAMAYO E.
Research output: Contribution to journal › Article › Research
2
Citations
(Scopus)