RIE induced damage in MOS structures

A. de Dios, E. Castán, L. Bailón, J. Barbolla, M. Lozano, LORA TAMAYO E.

Research output: Contribution to journalArticleResearch

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)1419-1423
JournalSolid-state electronics
Volume33
Issue number11
Publication statusPublished - 1 Jan 1990

Cite this