Revision of different optical metrology techniques

Alfonso Moreno, Juan Campos

    Research output: Contribution to journalArticleResearchpeer-review

    Abstract

    This work starts, from, a european project with the goal of improving, the quality of the measurement of the planar surfaces, like for instance wafers, liquid crystal screens, etc. For that purpose we selected ono of the actual metrology techniques: optical deflectometry., There exist different techniques devoted to the measurement of the shape of surfaces, like for instance light in flight, confacal microscopy, atomic force microscopy, interferometry... By, means of these techniques it is possible to calibrate possible irregularities in the sample surface, with respect to a standard surface, Each one of these techniques presents different characteristics in terms of resolution, dynamic range, sensitivity or dimensions of the sample. In this work we presept a revision of these techniques and their characteristics. © Sociedad Española de Óptica.
    Original languageEnglish
    Pages (from-to)267-280
    JournalOptica Pura y Aplicada
    Volume40
    Issue number3
    Publication statusPublished - 1 Dec 2007

    Keywords

    • Information processing
    • Numerical integration
    • Optical deflectometry
    • Surface measurements

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