Resonating cantilever mass sensor with mechanical on-plane excitation

J. Teva; G. Abadal; X. Jordà; X. Borrisé; Z. Davis; N. Barniol; Vijay K. Varadan editors: Jung-Chih Chiao

Resonating cantilever mass sensor with mechanical on-plane excitation

J. Teva, G. Abadal, X. Jordà, X. Borrisé, Z. Davis, N. Barniol, Vijay K. Varadan editors: Jung-Chih Chiao (Editor)

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	Smart Sensors, Actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain
Place of Publication	Bellingham (US)
Pages	353-363
Number of pages	10
Edition	1
Publication status	Published - 1 Jan 2003

Publication series

Name	Proceedings of SPIE--the International Society for Optical Engineering ; 5116

Cite this

Teva, J., Abadal, G., Jordà, X., Borrisé, X., Davis, Z., Barniol, N., & editors: Jung-Chih Chiao, V. K. V. (Ed.) (2003). Resonating cantilever mass sensor with mechanical on-plane excitation. In Smart Sensors, Actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain (1 ed., pp. 353-363). (Proceedings of SPIE--the International Society for Optical Engineering ; 5116)..

@inbook{6689c570cfa34f8489b7193fa0988464,

title = "Resonating cantilever mass sensor with mechanical on-plane excitation",

author = "J. Teva and G. Abadal and X. Jord{\`a} and X. Borris{\'e} and Z. Davis and N. Barniol and {editors: Jung-Chih Chiao}, {Vijay K. Varadan}",

year = "2003",

month = jan,

day = "1",

language = "English",

isbn = "978-0-8194-4976-4",

series = "Proceedings of SPIE--the International Society for Optical Engineering ; 5116",

pages = "353--363",

booktitle = "Smart Sensors, Actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain",

edition = "1",

}

Teva, J, Abadal, G, Jordà, X, Borrisé, X, Davis, Z, Barniol, N & editors: Jung-Chih Chiao, VKV (ed.) 2003, Resonating cantilever mass sensor with mechanical on-plane excitation. in Smart Sensors, Actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain. 1 edn, Proceedings of SPIE--the International Society for Optical Engineering ; 5116, Bellingham (US), pp. 353-363.

Resonating cantilever mass sensor with mechanical on-plane excitation. / Teva, J.; Abadal, G.; Jordà, X. et al.

Smart Sensors, Actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain. 1. ed. Bellingham (US), 2003. p. 353-363 (Proceedings of SPIE--the International Society for Optical Engineering ; 5116).

Research output: Chapter in Book › Chapter › Research

TY - CHAP

T1 - Resonating cantilever mass sensor with mechanical on-plane excitation

AU - Teva, J.

AU - Abadal, G.

AU - Jordà, X.

AU - Borrisé, X.

AU - Davis, Z.

AU - Barniol, N.

A2 - editors: Jung-Chih Chiao, Vijay K. Varadan

PY - 2003/1/1

Y1 - 2003/1/1

M3 - Chapter

SN - 978-0-8194-4976-4

T3 - Proceedings of SPIE--the International Society for Optical Engineering ; 5116

SP - 353

EP - 363

BT - Smart Sensors, Actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain

CY - Bellingham (US)

ER -