Resonating cantilever mass sensor with mechanical on-plane excitation

J. Teva, G. Abadal, X. Jordà, X. Borrisé, Z. Davis, N. Barniol, Vijay K. Varadan editors: Jung-Chih Chiao (Editor)

    Research output: Chapter in BookChapterResearch

    Original languageEnglish
    Title of host publicationSmart Sensors, Actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain
    Place of PublicationBellingham (US)
    Number of pages10
    Publication statusPublished - 1 Jan 2003

    Publication series

    NameProceedings of SPIE--the International Society for Optical Engineering ; 5116

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