Resonating cantilever mass sensor integrated with CMOS circuitry

Z. Davis, G. Abadal, E. Forsen, O. Hansen, F. Campabadal, E. Figueras, J. Esteve, J. Verd, F. Pérez-Murano, X. Borrisé, S.G. Nilsson, I. Maximov, L. Montelius, N. Barniol, A. Boisen

    Research output: Chapter in BookChapterResearch

    Original languageEnglish
    Title of host publicationDigest of technical papers of the 12th international conference on solid-state sensors, acuators and microsystems, Transducers'03
    Place of PublicationBoston (US)
    Number of pages3
    Publication statusPublished - 1 Jan 2003

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