Resonating cantilever mass sensor integrated with CMOS circuitry

Z. Davis; G. Abadal; E. Forsen; O. Hansen; F. Campabadal; E. Figueras; J. Esteve; J. Verd; F. Pérez-Murano; X. Borrisé; S.G. Nilsson; I. Maximov; L. Montelius; N. Barniol; A. Boisen

Resonating cantilever mass sensor integrated with CMOS circuitry

Z. Davis, G. Abadal, E. Forsen, O. Hansen, F. Campabadal, E. Figueras, J. Esteve, J. Verd, F. Pérez-Murano, X. Borrisé, S.G. Nilsson, I. Maximov, L. Montelius, N. Barniol, A. Boisen

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	Digest of technical papers of the 12th international conference on solid-state sensors, acuators and microsystems, Transducers'03
Place of Publication	Boston (US)
Pages	496-499
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2003

Cite this

Davis, Z., Abadal, G., Forsen, E., Hansen, O., Campabadal, F., Figueras, E., Esteve, J., Verd, J., Pérez-Murano, F., Borrisé, X., Nilsson, S. G., Maximov, I., Montelius, L., Barniol, N., & Boisen, A. (2003). Resonating cantilever mass sensor integrated with CMOS circuitry. In Digest of technical papers of the 12th international conference on solid-state sensors, acuators and microsystems, Transducers'03 (1 ed., pp. 496-499).

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title = "Resonating cantilever mass sensor integrated with CMOS circuitry",

author = "Z. Davis and G. Abadal and E. Forsen and O. Hansen and F. Campabadal and E. Figueras and J. Esteve and J. Verd and F. P{\'e}rez-Murano and X. Borris{\'e} and S.G. Nilsson and I. Maximov and L. Montelius and N. Barniol and A. Boisen",

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Davis, Z, Abadal, G, Forsen, E, Hansen, O, Campabadal, F, Figueras, E, Esteve, J, Verd, J, Pérez-Murano, F, Borrisé, X, Nilsson, SG, Maximov, I, Montelius, L, Barniol, N & Boisen, A 2003, Resonating cantilever mass sensor integrated with CMOS circuitry. in Digest of technical papers of the 12th international conference on solid-state sensors, acuators and microsystems, Transducers'03. 1 edn, Boston (US), pp. 496-499.

TY - CHAP

T1 - Resonating cantilever mass sensor integrated with CMOS circuitry

AU - Davis, Z.

AU - Abadal, G.

AU - Forsen, E.

AU - Hansen, O.

AU - Campabadal, F.

AU - Figueras, E.

AU - Esteve, J.

AU - Verd, J.

AU - Pérez-Murano, F.

AU - Borrisé, X.

AU - Nilsson, S.G.

AU - Maximov, I.

AU - Montelius, L.

AU - Barniol, N.

AU - Boisen, A.

PY - 2003/1/1

Y1 - 2003/1/1

M3 - Chapter

SN - 978-0-7803-7731-8

SP - 496

EP - 499

BT - Digest of technical papers of the 12th international conference on solid-state sensors, acuators and microsystems, Transducers'03

CY - Boston (US)

ER -