TY - JOUR
T1 - Resonant silicon accelerometers in bulk micromachining technology - An approach
AU - Burrer, Christian
AU - Esteve, Jaume
AU - Lora-Tamayo, Emilio
PY - 1996/6/1
Y1 - 1996/6/1
N2 - The fabrication and characterization of resonant silicon accelerometers, made in bulk micromachining technology, is presented. The devices consist of a silicon mass, coupled axially to a strain-sensitive vibrating silicon beam. The beam is driven electrothermally and sensed piezoresistively by means of implanted piezoresistors. Two different accelerometer types are shown, differing in the complexity of the respective fabrication processes and in performances. Closed-loop operation of the devices is demonstrated. Also in the closed loop, static and dynamic measurements of prototypes have been performed. The sensor types presented are compared, and the resonant acceleration sensor concept is discussed.
AB - The fabrication and characterization of resonant silicon accelerometers, made in bulk micromachining technology, is presented. The devices consist of a silicon mass, coupled axially to a strain-sensitive vibrating silicon beam. The beam is driven electrothermally and sensed piezoresistively by means of implanted piezoresistors. Two different accelerometer types are shown, differing in the complexity of the respective fabrication processes and in performances. Closed-loop operation of the devices is demonstrated. Also in the closed loop, static and dynamic measurements of prototypes have been performed. The sensor types presented are compared, and the resonant acceleration sensor concept is discussed.
U2 - https://doi.org/10.1109/84.506200
DO - https://doi.org/10.1109/84.506200
M3 - Article
SN - 1057-7157
VL - 5
SP - 122
EP - 130
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
ER -