Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process

J. Verd, G. Abadal, J. Teva, A. Uranga, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationMEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006
Place of PublicationNova York (US)
Number of pages3
Publication statusPublished - 1 Jan 2006

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