Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process

J. Verd; G. Abadal; J. Teva; A. Uranga; F. Pérez-Murano; J. Esteve; N. Barniol

Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process

J. Verd, G. Abadal, J. Teva, A. Uranga, F. Pérez-Murano, J. Esteve, N. Barniol

Department of Electronic Engineering

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006
Place of Publication	Nova York (US)
Pages	638-641
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2006

Cite this

Verd, J., Abadal, G., Teva, J., Uranga, A., Pérez-Murano, F., Esteve, J., & Barniol, N. (2006). Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process. In MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006 (1 ed., pp. 638-641).

Verd, J. ; Abadal, G. ; Teva, J. ; Uranga, A. ; Pérez-Murano, F. ; Esteve, J. ; Barniol, N. / Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process. MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006. 1. ed. Nova York (US), 2006. pp. 638-641

@inbook{af4e910f7af441afb6ba0d1985e64475,

title = "Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process",

author = "J. Verd and G. Abadal and J. Teva and A. Uranga and F. P{\'e}rez-Murano and J. Esteve and N. Barniol",

year = "2006",

month = jan,

day = "1",

language = "English",

isbn = "978-0-7803-9475-9",

pages = "638--641",

booktitle = "MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006",

edition = "1",

}

Verd, J, Abadal, G, Teva, J, Uranga, A, Pérez-Murano, F, Esteve, J & Barniol, N 2006, Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process. in MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006. 1 edn, Nova York (US), pp. 638-641.

Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process. / Verd, J.; Abadal, G.; Teva, J.; Uranga, A.; Pérez-Murano, F.; Esteve, J.; Barniol, N.

MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006. 1. ed. Nova York (US), 2006. p. 638-641.

Research output: Chapter in Book › Chapter › Research

TY - CHAP

T1 - Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process

AU - Verd, J.

AU - Abadal, G.

AU - Teva, J.

AU - Uranga, A.

AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Barniol, N.

PY - 2006/1/1

Y1 - 2006/1/1

M3 - Chapter

SN - 978-0-7803-9475-9

SP - 638

EP - 641

BT - MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006

CY - Nova York (US)

ER -

Verd J, Abadal G, Teva J, Uranga A, Pérez-Murano F, Esteve J et al. Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process. In MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006. 1 ed. Nova York (US). 2006. p. 638-641