Original language | English |
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Title of host publication | MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006 |
Place of Publication | Nova York (US) |
Pages | 638-641 |
Number of pages | 3 |
Edition | 1 |
Publication status | Published - 1 Jan 2006 |
Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-\mum CMOS process
J. Verd, G. Abadal, J. Teva, A. Uranga, F. Pérez-Murano, J. Esteve, N. Barniol
Research output: Chapter in Book › Chapter › Research