Resonant metal cantilever with attogram/Hz mass sensitivity fully integrated in a standard 0.35-um CMOS process

J. Verd, G. Abadal, J. Teva, D' altri

Research output: Contribution to journalArticleResearch

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)638-641
JournalProc. IEEE micro electro mech. syst.
Volume2006
Publication statusPublished - 1 Jan 2006

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