Residual stress and texture in poly-SiC films grown by low-pressure organometallic chemical-vapor deposition

Research output: Contribution to journalArticleResearch

31 Citations (Scopus)
Original languageEnglish
Pages (from-to)1748-1758
JournalJournal of Applied Physics
Volume87
Issue number4
Publication statusPublished - 1 Feb 2000

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