TY - JOUR
T1 - Remote dynamic actuation of an electrostatically driven microcantilever by a wireless power transfer system
AU - Ruiz, Raul
AU - Abadal Berini, Gabriel
PY - 2022
Y1 - 2022
N2 - The design, modelling, fabrication and test of a device prototype, based on a microcantilever capacitively connected to a folded-end half-wave dipole antenna, which is remotely actuated by a wireless power transfer (WPT) system are presented here. The microcantilever and the antenna, which are coupled at the antenna feeding point, work as a new device, is able to harness the radiated energy wirelessly transferred from an emitter antenna to directly excite the mechanical vibration modes of the microcantilever. The response to an amplitude-modulated (AM) RF radiated signal excitation produced by a transmitting antenna is experimentally analysed and fit to a simple model when the distance between both antennas varies from the near field to the radiated far field regime.
AB - The design, modelling, fabrication and test of a device prototype, based on a microcantilever capacitively connected to a folded-end half-wave dipole antenna, which is remotely actuated by a wireless power transfer (WPT) system are presented here. The microcantilever and the antenna, which are coupled at the antenna feeding point, work as a new device, is able to harness the radiated energy wirelessly transferred from an emitter antenna to directly excite the mechanical vibration modes of the microcantilever. The response to an amplitude-modulated (AM) RF radiated signal excitation produced by a transmitting antenna is experimentally analysed and fit to a simple model when the distance between both antennas varies from the near field to the radiated far field regime.
KW - RF-MEMS
KW - Wireless power transfer
KW - Electrostatic actuation
U2 - 10.1016/j.sna.2022.113798
DO - 10.1016/j.sna.2022.113798
M3 - Article
SN - 0924-4247
VL - 345
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
ER -