Relation between defect generation, SILC and soft-breakdown in thin (< 5 nm) oxides

R. Rodríguez, E. Miranda, R. Pau, J. Suñé, M. Nafría, X. Aymerich

Research output: Contribution to journalArticleResearch

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)707-710
JournalMicroelectronics and Reliability
Volume40
Publication statusPublished - 1 Jan 2000

Cite this