Quantitative Evaluation of Implantation Damage and Damage Recovery after Room Temperature Ion-Implantation of Nand P+ Ions in 6H-SiC

S. Blanque, R. Pérez, M. Zielinski, J. Pernot, N. Mestres, J. Pascual, P. Godignon, J. Camassel

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)433-436
JournalMater. sci. eng., B
Volume653
Publication statusPublished - 1 Jan 2003

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