Ptsi clustering in silicon probed by transport spectroscopy

Massimo Mongillo, Panayotis Spathis, Georgios Katsaros, Silvano De Franceschi, Pascal Gentile, Riccardo Rurali, Xavier Cartoixà

Research output: Contribution to journalArticleResearchpeer-review

3 Citations (Scopus)

Abstract

Metal silicides formed by means of thermal annealing processes are employed as contact materials in microelectronics. Control of the structure of silicide/silicon interfaces becomes a critical issue when the characteristic size of the device is reduced below a few tens of nanometers. Here, we report on silicide clustering occurring within the channel of PtSi/Si/PtSi Schottky-barrier transistors. This phenomenon is investigated through atomistic simulations and low-temperature resonant-tunneling spectroscopy. Our results provide evidence for the segregation of a PtSi cluster with a diameter of a few nanometers from the silicide contact. The cluster acts as a metallic quantum dot giving rise to distinct signatures of quantum transport through its discrete energy states.
Original languageEnglish
Article numbere041025
JournalPhysical Review X
Volume3
DOIs
Publication statusPublished - 14 Feb 2014

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