Proceedings of the 9thMicromechanics Europe Workshop-MME'98: Test Microestructures for Measurement of SiC Thin Films Mechanical Properties: 9thMicromechanics Europe Workshop-MME'98:

C. Serre, A. Pérez, A. Romano, J.R. Morante, J. Esteve, M.C. Acero

    Research output: Book/ReportProceedingResearch

    Original languageEnglish
    Place of PublicationUlvik in Hardanger (NO)
    Number of pages4
    Publication statusPublished - Jun 1998

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