Proceedings of the 9thMicromechanics Europe Workshop-MME'98: "Electrical Network Simulator - FEM ToolCoupling Applied to the DesignOptimisation of a CMOS Integrated Pressure Sensor: 9thMicromechanics Europe Workshop-MME'98

A. Götz; H. Krassow; M. Zabala; J. Santander

Proceedings of the 9thMicromechanics Europe Workshop-MME'98: "Electrical Network Simulator - FEM ToolCoupling Applied to the DesignOptimisation of a CMOS Integrated Pressure Sensor: 9thMicromechanics Europe Workshop-MME'98

A. Götz, H. Krassow, M. Zabala, J. Santander

Institut de Microelectrònica de Barcelona

Research output: Book/Report › Proceeding › Research

Original language	English
Place of Publication	Ulvik in Hardanger (NO)
Number of pages	4
Publication status	Published - Jun 1998

Cite this

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title = "Proceedings of the 9thMicromechanics Europe Workshop-MME'98: {"}Electrical Network Simulator - FEM ToolCoupling Applied to the DesignOptimisation of a CMOS Integrated Pressure Sensor: 9thMicromechanics Europe Workshop-MME'98",

author = "A. G{\"o}tz and H. Krassow and M. Zabala and J. Santander",

year = "1998",

month = jun,

language = "English",

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TY - BOOK

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AU - Götz, A.

AU - Krassow, H.

AU - Zabala, M.

AU - Santander, J.

PY - 1998/6

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M3 - Proceeding

BT - Proceedings of the 9thMicromechanics Europe Workshop-MME'98: "Electrical Network Simulator - FEM ToolCoupling Applied to the DesignOptimisation of a CMOS Integrated Pressure Sensor

CY - Ulvik in Hardanger (NO)

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