Proceedings of the 9thMicromechanics Europe Workshop-MME'98: "Cantilever Beam Accelerometer with Selftest System: Simulation, Technology and experimental Results: 9thMicromechanics Europe Workshop-MME'98:

J.A. Palza; J. Esteve; E. Lora-Tamayo

Proceedings of the 9thMicromechanics Europe Workshop-MME'98: "Cantilever Beam Accelerometer with Selftest System: Simulation, Technology and experimental Results: 9thMicromechanics Europe Workshop-MME'98:

J.A. Palza, J. Esteve, E. Lora-Tamayo

Research output: Book/Report › Proceeding › Research

Original language	English
Place of Publication	Ulvik in Hardanger (NO)
Number of pages	4
Publication status	Published - Jun 1998

Cite this

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title = "Proceedings of the 9thMicromechanics Europe Workshop-MME'98: {"}Cantilever Beam Accelerometer with Selftest System: Simulation, Technology and experimental Results: 9thMicromechanics Europe Workshop-MME'98:",

author = "J.A. Palza and J. Esteve and E. Lora-Tamayo",

year = "1998",

month = jun,

language = "English",

}

TY - BOOK

T1 - Proceedings of the 9thMicromechanics Europe Workshop-MME'98: "Cantilever Beam Accelerometer with Selftest System: Simulation, Technology and experimental Results

T2 - 9thMicromechanics Europe Workshop-MME'98:

AU - Palza, J.A.

AU - Esteve, J.

AU - Lora-Tamayo, E.

PY - 1998/6

Y1 - 1998/6

M3 - Proceeding

BT - Proceedings of the 9thMicromechanics Europe Workshop-MME'98: "Cantilever Beam Accelerometer with Selftest System: Simulation, Technology and experimental Results

CY - Ulvik in Hardanger (NO)

ER -