Original language | Undefined/Unknown |
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Place of Publication | Osaka (JP) |
Number of pages | 6 |
ISBN (Electronic) | 0780343484 |
Publication status | Published - Mar 1998 |
Proceedings of the 1998 International Conference on Microelectronic Test Structures: "Test Structures for MCM-D Technology Characterization": IEEE International Conference on Microelectronic Test Structures - ICMT'98
M. Lozano, J. Santander, E. Cabruja, C. Perelló, M. Ullán, E. Lora-Tamayo, IEEE (Editor)
Research output: Book/Report › Proceeding › Research