Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching. 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII

M. Duch, J. Esteve, M.C. Acero, A. Merlos

    Research output: Book/ReportProceedingResearch

    Original languageEnglish
    Place of PublicationSouthampton (GB)
    Number of pages4
    ISBN (Electronic)0750305633
    Publication statusPublished - Sep 1998

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