Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching.: 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII

M. Duch; J. Esteve; M.C. Acero; A. Merlos

Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching. 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII

M. Duch, J. Esteve, M.C. Acero, A. Merlos

Research output: Book/Report › Proceeding › Research

Original language	English
Place of Publication	Southampton (GB)
Number of pages	4
ISBN (Electronic)	0750305633
Publication status	Published - Sep 1998

Cite this

Duch, M., Esteve, J., Acero, M. C., & Merlos, A. (1998). Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching. 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII.

Duch, M. ; Esteve, J. ; Acero, M.C. ; Merlos, A. / Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching. 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII. Southampton (GB), 1998. 4 p.

@book{86d23c42062048149f761b39bcbae798,

title = "Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: {"}Non Standard Behaviour of TMAH anisotropic wet etching.: 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII",

author = "M. Duch and J. Esteve and M.C. Acero and A. Merlos",

year = "1998",

month = sep,

language = "English",

isbn = "0-7503-0563-3",

}

Duch, M, Esteve, J, Acero, MC & Merlos, A 1998, Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching. 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII. Southampton (GB).

Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching. 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII. / Duch, M.; Esteve, J.; Acero, M.C.; Merlos, A.

Southampton (GB), 1998. 4 p.

Research output: Book/Report › Proceeding › Research

TY - BOOK

T1 - Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching.

T2 - 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII

AU - Duch, M.

AU - Esteve, J.

AU - Acero, M.C.

AU - Merlos, A.

PY - 1998/9

Y1 - 1998/9

M3 - Proceeding

SN - 0-7503-0563-3

BT - Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching.

CY - Southampton (GB)

ER -

Duch M, Esteve J, Acero MC, Merlos A. Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII: "Non Standard Behaviour of TMAH anisotropic wet etching. 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications - EUROSENSORS XII. Southampton (GB), 1998. 4 p.