Original language | English |
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Pages (from-to) | 689-689 |
Journal | Microelectronic engineering. Special Issue |
Volume | 84 |
Issue number | 5-8 |
DOIs | |
Publication status | Published - 1 Aug 2007 |
Proceedings of MNE06. Micro-and Nano-Engineering 2006 32nd International Conference (prefaci i edició)
F. Pérez-Murano, J. Bausells, G. Abadal
Research output: Contribution to journal › Article › Research