Proceeding of the 194th Meeting of the Electrochemical Society. "Characterization of RTCVD Grwn Si Films on SiO2 for nanotechnology applications". 194th Meeting of the Electrochemical Society.

J. Vizoso, F. Martín, M. Martínez, M. Gariiga, X. Aymerich, Electrochemical Society (Editor)

    Research output: Book/ReportProceedingResearch

    Original languageUndefined/Unknown
    Place of PublicationBoston. (US)
    Number of pages1
    Publication statusPublished - Jun 1998

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