Practical case example of inertial mems modeling with VHDL-AMS

Considering the evolution of the development of Sensors and Actuators a different learning curve between MEMS and integrated circuits is found. One of the possible solutions is to extend the use of design and simulation tools and languages design to integrate electromagnetic, thermal systems, etc. The modelling becomes a complex task, due to the fact that each component of the system can belong to different physical domains and can present a different better representation level. After that phase, the fabrication has to be done to assemble all the parts (device, analogue, mixed and digital) to finally do the test and qualification. The example that will be presented is a modelling of a Smart Sensor using VHDL-AMS. The system is composed by an accelerometer, its associated output circuitry and a sensor's bus interface. © 2005 Springer.