Possibilities of thin-film bulk acoustic resonators as punctual mass sensors

H. Campanella, J. Esteve, J. Montserrat, A. Uranga, G. Abadal, N. Barniol, A. Romano-Rodríguez

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)3414-3414
JournalJournal of the Acoustical Society of America
Volume119
Issue number5
Publication statusPublished - 1 Jan 2006

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