Point spread function and coherent line response in optical systems with non-uniform transmission pupils: Application to photolithography

R. Hild; J. C. Escalera; M. J. Yzuel; R. Muschall

doi:10.1088/0963-9659/4/6/009

Point spread function and coherent line response in optical systems with non-uniform transmission pupils: Application to photolithography

R. Hild, J. C. Escalera, M. J. Yzuel, R. Muschall

Research output: Contribution to journal › Article › Research › peer-review

9 Citations (Scopus)

Abstract

The three-dimensional (3D) coherent line and the 3D point response functions of optical systems with non-uniform pupils are discussed for possible applications of these filters in photolithography. In this case, filters that are hyper-resolving in the transverse direction and apodizing in the axial direction are of special interest. For both line- and point-like objects, we analyse the resulting image intensities and show that the resolution, the heights of the side lobes (pseudostructures) and the depth of focus differ in dependence on the pupil filter.

Original language	English
Article number	009
Pages (from-to)	795-810
Journal	Pure and Applied Optics: Journal of the European Optical Society Part A
Volume	4
Issue number	6
DOIs	https://doi.org/10.1088/0963-9659/4/6/009
Publication status	Published - 1 Jan 1995

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title = "Point spread function and coherent line response in optical systems with non-uniform transmission pupils: Application to photolithography",

abstract = "The three-dimensional (3D) coherent line and the 3D point response functions of optical systems with non-uniform pupils are discussed for possible applications of these filters in photolithography. In this case, filters that are hyper-resolving in the transverse direction and apodizing in the axial direction are of special interest. For both line- and point-like objects, we analyse the resulting image intensities and show that the resolution, the heights of the side lobes (pseudostructures) and the depth of focus differ in dependence on the pupil filter.",

author = "R. Hild and Escalera, {J. C.} and Yzuel, {M. J.} and R. Muschall",

year = "1995",

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Point spread function and coherent line response in optical systems with non-uniform transmission pupils: Application to photolithography. / Hild, R.; Escalera, J. C.; Yzuel, M. J.; Muschall, R.

In: Pure and Applied Optics: Journal of the European Optical Society Part A, Vol. 4, No. 6, 009, 01.01.1995, p. 795-810.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Point spread function and coherent line response in optical systems with non-uniform transmission pupils: Application to photolithography

AU - Hild, R.

AU - Escalera, J. C.

AU - Yzuel, M. J.

AU - Muschall, R.

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Y1 - 1995/1/1

N2 - The three-dimensional (3D) coherent line and the 3D point response functions of optical systems with non-uniform pupils are discussed for possible applications of these filters in photolithography. In this case, filters that are hyper-resolving in the transverse direction and apodizing in the axial direction are of special interest. For both line- and point-like objects, we analyse the resulting image intensities and show that the resolution, the heights of the side lobes (pseudostructures) and the depth of focus differ in dependence on the pupil filter.

AB - The three-dimensional (3D) coherent line and the 3D point response functions of optical systems with non-uniform pupils are discussed for possible applications of these filters in photolithography. In this case, filters that are hyper-resolving in the transverse direction and apodizing in the axial direction are of special interest. For both line- and point-like objects, we analyse the resulting image intensities and show that the resolution, the heights of the side lobes (pseudostructures) and the depth of focus differ in dependence on the pupil filter.

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DO - 10.1088/0963-9659/4/6/009

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VL - 4

SP - 795

EP - 810

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M1 - 009

ER -

Point spread function and coherent line response in optical systems with non-uniform transmission pupils: Application to photolithography

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