Point spread function and coherent line response in optical systems with non-uniform transmission pupils: Application to photolithography

R. Hild, J. C. Escalera, M. J. Yzuel, R. Muschall

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9 Citations (Scopus)

Abstract

The three-dimensional (3D) coherent line and the 3D point response functions of optical systems with non-uniform pupils are discussed for possible applications of these filters in photolithography. In this case, filters that are hyper-resolving in the transverse direction and apodizing in the axial direction are of special interest. For both line- and point-like objects, we analyse the resulting image intensities and show that the resolution, the heights of the side lobes (pseudostructures) and the depth of focus differ in dependence on the pupil filter.
Original languageEnglish
Article number009
Pages (from-to)795-810
JournalPure and Applied Optics: Journal of the European Optical Society Part A
Volume4
Issue number6
DOIs
Publication statusPublished - 1 Jan 1995

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