| Original language | English |
|---|---|
| Pages (from-to) | 279-283 |
| Journal | Sens. actuators, A, Phys. |
| Volume | 66 |
| Issue number | 1-3 |
| Publication status | Published - 1 Jan 1998 |
Photolithographic Packaging of Silicon Pressure Sensors
H. Krassow, E. Lora-Tamayo, F. Campabadal
Research output: Contribution to journal › Article › Research
14
Citations
(Scopus)