Photolithographic Packaging of Silicon Pressure Sensors

H. Krassow, E. Lora-Tamayo, F. Campabadal

    Research output: Contribution to journalArticleResearch

    14 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)279-283
    JournalSens. actuators, A, Phys.
    Volume66
    Issue number1-3
    Publication statusPublished - 1 Jan 1998

    Cite this