TY - JOUR
T1 - Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS
AU - Zamora, I.
AU - Ledesma, E.
AU - Uranga, A.
AU - Barniol, N.
N1 - Publisher Copyright:
© 1980-2012 IEEE.
PY - 2022/7/1
Y1 - 2022/7/1
N2 - In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The {7}× {7} array along with the analog-front-end circuit has been configured to work as a linear phased array. Experiments carried out have demonstrated the homogeneous PMUT's behavior, showing a small dispersion in terms of frequency, bandwidth, and sensitivity. The feasibility of easily performing a transmission beam steering and focusing has been proven. In particular, the beam directivity has been characterized in terms of the width of the main lobe. The integrated CMOS analog-front-end allows the reduction of parasitic elements and noise, improving the signal to noise ratio (SNR). As a proof of concept, a B-mode image, with a 16 dB dynamic range, using a single {7}× {1} AlScN PMUT-on-CMOS channel as a receiver has been obtained.
AB - In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The {7}× {7} array along with the analog-front-end circuit has been configured to work as a linear phased array. Experiments carried out have demonstrated the homogeneous PMUT's behavior, showing a small dispersion in terms of frequency, bandwidth, and sensitivity. The feasibility of easily performing a transmission beam steering and focusing has been proven. In particular, the beam directivity has been characterized in terms of the width of the main lobe. The integrated CMOS analog-front-end allows the reduction of parasitic elements and noise, improving the signal to noise ratio (SNR). As a proof of concept, a B-mode image, with a 16 dB dynamic range, using a single {7}× {1} AlScN PMUT-on-CMOS channel as a receiver has been obtained.
KW - Acoustic transducers
KW - piezoelectric micromachined ultrasonic transducers (PMUT)
KW - PMUT-on-CMOS
KW - ultrasound imaging
UR - http://www.scopus.com/inward/record.url?scp=85130442952&partnerID=8YFLogxK
U2 - 10.1109/LED.2022.3175323
DO - 10.1109/LED.2022.3175323
M3 - Article
AN - SCOPUS:85130442952
SN - 0741-3106
VL - 43
SP - 1113
EP - 1116
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
IS - 7
ER -