© 2004-2012 IEEE. In this paper, we will present an all-CMOS oscillator based on monolithically integrated MEMS resonators fabricated from the VIA layer (tungsten) of a 0.35 μm CMOS technology process. With this CMOS MEMS closed-loop system, the nonlinear MEMS frequency response due to the electrostatic actuation has been reconstructed. Using a phase-controlled closed-loop the frequency stability of the self-sustained oscillator at different nonlinear operation points has been analyzed, showing an optimal point belonging to the unstable region of the MEMS resonator.
|Journal||IEEE Transactions on Circuits and Systems I: Regular Papers|
|Publication status||Published - 1 Dec 2017|
- MEMS-based oscillators
Uranga, A., Sobreviela, G., Riverola, M., Torres, F., & Barniol, N. (2017). Phase-Noise Reduction in a CMOS-MEMS Oscillator under Nonlinear MEMS Operation. IEEE Transactions on Circuits and Systems I: Regular Papers, 64(12), 3047-3055. . https://doi.org/10.1109/TCSI.2017.2758860