In this paper, we will present an all-CMOS oscillator based on monolithically integrated MEMS resonators fabricated from the VIA layer (tungsten) of a 0.35 μm CMOS technology process. With this CMOS MEMS closed-loop system, the nonlinear MEMS frequency response due to the electrostatic actuation has been reconstructed. Using a phase-controlled closed-loop the frequency stability of the self-sustained oscillator at different nonlinear operation points has been analyzed, showing an optimal point belonging to the unstable region of the MEMS resonator.
|Number of pages||9|
|Journal||IEEE Transactions on Circuits and Systems I: Regular Papers|
|Publication status||Published - 1 Dec 2017|
- MEMS-based oscillators