Phase-Noise Reduction in a CMOS-MEMS Oscillator under Nonlinear MEMS Operation

Arantxa Uranga*, Guillermo Sobreviela, Martin Riverola, Francesc Torres, Nuria Barniol

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)


In this paper, we will present an all-CMOS oscillator based on monolithically integrated MEMS resonators fabricated from the VIA layer (tungsten) of a 0.35 μm CMOS technology process. With this CMOS MEMS closed-loop system, the nonlinear MEMS frequency response due to the electrostatic actuation has been reconstructed. Using a phase-controlled closed-loop the frequency stability of the self-sustained oscillator at different nonlinear operation points has been analyzed, showing an optimal point belonging to the unstable region of the MEMS resonator.

Original languageEnglish
Article number8077754
Pages (from-to)3047-3055
Number of pages9
JournalIEEE Transactions on Circuits and Systems I: Regular Papers
Issue number12
Publication statusPublished - 1 Dec 2017


  • MEMS-based oscillators
  • Noise


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