Original language | English |
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Pages (from-to) | 1479-1482 |
Journal | Microelectron. Eng. |
Volume | 87 |
Issue number | 5-8 |
DOIs | |
Publication status | Published - 1 Jan 2010 |
Pattern transfer optimization for the fabrication of arrays of silicon nanowires
Y. Gebremichael, A. Sánchez, X. Borrise, M. Schmidt, A.R. Goñi, M.I. Alonso, R. Rurali, J. Suñé, X. Cartoixà, F. Pérez-Murano
Research output: Contribution to journal › Article › Research
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(Scopus)