Pattern transfer optimization for the fabrication of arrays of silicon nanowires

Y. Gebremichael, A. Sánchez, X. Borrise, M. Schmidt, A.R. Goñi, M.I. Alonso, R. Rurali, J. Suñé, X. Cartoixà, F. Pérez-Murano

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)1479-1482
JournalMicroelectron. Eng.
Volume87
Issue number5-8
DOIs
Publication statusPublished - 1 Jan 2010

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