Packaged CMOS-MEMS free-free beam oscillator

E. Marigó, J. Verd, J. L. López, A. Uranga, N. Barniol

Research output: Contribution to journalArticleResearchpeer-review

10 Citations (Scopus)


In this paper a self-oscillator based on a polysilicon free-free beam resonator monolithically integrated and packaged in a 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology is presented. The oscillator is capable of providing a 350 mVPPsinusoidal signal at 25.6 MHz, with a bias polarization voltage of 7 V. The microelectromechanical systems (MEMS) resonator is packaged using only the back-end-of-line metal layers of the CMOS technology, providing a complete low-cost CMOS-MEMS processing for on-chip frequency references. © 2013 IOP Publishing Ltd.
Original languageEnglish
Article number115018
JournalJournal of Micromechanics and Microengineering
Publication statusPublished - 1 Nov 2013

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