Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors

J. Agustí; I. Pellejero; G. Abadal; G. Murillo; M. A. Urbiztondo; J. Sesé; M. Villarroya-Gaudó; M. Pina; J. Santamaría; N. Barniol

doi:https://doi.org/10.1016/j.mee.2009.12.009

Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors

J. Agustí, I. Pellejero, G. Abadal, G. Murillo, M. A. Urbiztondo, J. Sesé, M. Villarroya-Gaudó, M. Pina, J. Santamaría, N. Barniol

Research output: Contribution to journal › Article › Research › peer-review

4 Citations (Scopus)

Abstract

The aim of this work is the mechanical properties evaluation of well-intergrowth free-standing c-oriented silicalite cantilevers. A laser-based optical vibrometer has been developed for the characterization of the nanoporous cantilevers resonant properties. The system has proven to be useful to determine the resonance frequencies and Q-factor of the zeolite-only cantilevers at room temperature and atmospheric pressure. Young modulus of the prepared silicalite polycrystalline cantilevers around 30.09 ± 5.29 GPa has been evaluated. We have also built a controlled gas circuit attached to the vibrometer with the aim to make a dynamic characterization of the nanoporous cantilevers in presence of ethanol vapours to assess about their capability as chemical sensors. © 2009 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1207-1209
Journal	Microelectronic Engineering
Volume	87
DOIs	https://doi.org/10.1016/j.mee.2009.12.009
Publication status	Published - 1 May 2010

Keywords

Cantilever based sensors
Gas sensing
Optical detection
Q-factor
Silicalite
Young modulus

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title = "Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors",

abstract = "The aim of this work is the mechanical properties evaluation of well-intergrowth free-standing c-oriented silicalite cantilevers. A laser-based optical vibrometer has been developed for the characterization of the nanoporous cantilevers resonant properties. The system has proven to be useful to determine the resonance frequencies and Q-factor of the zeolite-only cantilevers at room temperature and atmospheric pressure. Young modulus of the prepared silicalite polycrystalline cantilevers around 30.09 ± 5.29 GPa has been evaluated. We have also built a controlled gas circuit attached to the vibrometer with the aim to make a dynamic characterization of the nanoporous cantilevers in presence of ethanol vapours to assess about their capability as chemical sensors. {\textcopyright} 2009 Elsevier B.V. All rights reserved.",

keywords = "Cantilever based sensors, Gas sensing, Optical detection, Q-factor, Silicalite, Young modulus",

author = "J. Agust{\'i} and I. Pellejero and G. Abadal and G. Murillo and Urbiztondo, {M. A.} and J. Ses{\'e} and M. Villarroya-Gaud{\'o} and M. Pina and J. Santamar{\'i}a and N. Barniol",

year = "2010",

month = may,

day = "1",

doi = "https://doi.org/10.1016/j.mee.2009.12.009",

language = "English",

volume = "87",

pages = "1207--1209",

journal = "Microelectronic Engineering",

issn = "0167-9317",

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TY - JOUR

T1 - Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors

AU - Agustí, J.

AU - Pellejero, I.

AU - Abadal, G.

AU - Murillo, G.

AU - Urbiztondo, M. A.

AU - Sesé, J.

AU - Villarroya-Gaudó, M.

AU - Pina, M.

AU - Santamaría, J.

AU - Barniol, N.

PY - 2010/5/1

Y1 - 2010/5/1

N2 - The aim of this work is the mechanical properties evaluation of well-intergrowth free-standing c-oriented silicalite cantilevers. A laser-based optical vibrometer has been developed for the characterization of the nanoporous cantilevers resonant properties. The system has proven to be useful to determine the resonance frequencies and Q-factor of the zeolite-only cantilevers at room temperature and atmospheric pressure. Young modulus of the prepared silicalite polycrystalline cantilevers around 30.09 ± 5.29 GPa has been evaluated. We have also built a controlled gas circuit attached to the vibrometer with the aim to make a dynamic characterization of the nanoporous cantilevers in presence of ethanol vapours to assess about their capability as chemical sensors. © 2009 Elsevier B.V. All rights reserved.

AB - The aim of this work is the mechanical properties evaluation of well-intergrowth free-standing c-oriented silicalite cantilevers. A laser-based optical vibrometer has been developed for the characterization of the nanoporous cantilevers resonant properties. The system has proven to be useful to determine the resonance frequencies and Q-factor of the zeolite-only cantilevers at room temperature and atmospheric pressure. Young modulus of the prepared silicalite polycrystalline cantilevers around 30.09 ± 5.29 GPa has been evaluated. We have also built a controlled gas circuit attached to the vibrometer with the aim to make a dynamic characterization of the nanoporous cantilevers in presence of ethanol vapours to assess about their capability as chemical sensors. © 2009 Elsevier B.V. All rights reserved.

KW - Cantilever based sensors

KW - Gas sensing

KW - Optical detection

KW - Q-factor

KW - Silicalite

KW - Young modulus

U2 - https://doi.org/10.1016/j.mee.2009.12.009

DO - https://doi.org/10.1016/j.mee.2009.12.009

M3 - Article

SN - 0167-9317

VL - 87

SP - 1207

EP - 1209

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors

Abstract

Keywords

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