Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors

J. Agustí, I. Pellejero, G. Abadal, G. Murillo, M. A. Urbiztondo, J. Sesé, M. Villarroya-Gaudó, M. Pina, J. Santamaría, N. Barniol

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4 Citations (Scopus)

Abstract

The aim of this work is the mechanical properties evaluation of well-intergrowth free-standing c-oriented silicalite cantilevers. A laser-based optical vibrometer has been developed for the characterization of the nanoporous cantilevers resonant properties. The system has proven to be useful to determine the resonance frequencies and Q-factor of the zeolite-only cantilevers at room temperature and atmospheric pressure. Young modulus of the prepared silicalite polycrystalline cantilevers around 30.09 ± 5.29 GPa has been evaluated. We have also built a controlled gas circuit attached to the vibrometer with the aim to make a dynamic characterization of the nanoporous cantilevers in presence of ethanol vapours to assess about their capability as chemical sensors. © 2009 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)1207-1209
JournalMicroelectronic Engineering
Volume87
DOIs
Publication statusPublished - 1 May 2010

Keywords

  • Cantilever based sensors
  • Gas sensing
  • Optical detection
  • Q-factor
  • Silicalite
  • Young modulus

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