Optical Investigation of Quality Improvement of 3C-SiC Films after a Sacrificial Oxidation Process

G. Arnaud, F. Alsina, J. Pascual, C. Dezauzier, J. Camassel, N. Bécourt, L. Di Ciocco

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)108-111
JournalMaterials Science and Technology
Issue number12
Publication statusPublished - 1 Jan 1996

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