Optical Investigation of Quality Improvement of 3C-SiC Films after a Sacrificial Oxidation Process

G. Arnaud, F. Alsina, J. Pascual, C. Dezauzier, J. Camassel, N. Bécourt, L. Di Ciocco

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)108-111
JournalMater. sci. technol.
Issue number12
Publication statusPublished - 1 Jan 1996

Cite this

Arnaud, G., Alsina, F., Pascual, J., Dezauzier, C., Camassel, J., Bécourt, N., & Di Ciocco, L. (1996). Optical Investigation of Quality Improvement of 3C-SiC Films after a Sacrificial Oxidation Process. Mater. sci. technol., (12), 108-111.