On the SiO\sub x\nosub Transition Layer in abrupt Si-SiO\sub 2 \nosub Chemical Interface in MOS Structures

Research output: Contribution to journalArticleResearch

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)463-472
JournalSurface Science
Volume0
Issue number208
Publication statusPublished - 1 Jan 1989

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