On the SiO\sub x\nosub Transition Layer in abrupt Si-SiO\sub 2 \nosub Chemical Interface in MOS Structures

J. Suñé, I. Placencia, N. Barniol, X. and Aymerich

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Cite this

@article{14749005b95a42e59139460d82478969,

title = "On the SiO\sub x\nosub Transition Layer in abrupt Si-SiO\sub 2 \nosub Chemical Interface in MOS Structures",

author = "J. Su{\~n}{\'e} and I. Placencia and N. Barniol and {and Aymerich}, X.",

year = "1989",

month = jan,

day = "1",

language = "English",

volume = "0",

pages = "463--472",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier",

number = "208",

}