SU-8 photosensitive epoxy resin was developed for the fabrication of high-aspect ratio microstructures in MEMS and microengineering applications, and has potential for use in the construction of novel gaseous micropattern radiation detectors. However, little is known of the behaviour of the cured material under irradiation. Mechanical properties of SU-8 film have been measured as a function of neutron exposure and compared with Kapton ® polyimide and Mylar® PET polyester films, materials routinely used in gaseous radiation detectors, to asses the suitability of SU-8 based microstructures for gaseous detector applications. After exposure to a reactor core neutron fluence of 7.5×1018 n cm-2, the new material showed a high level of resistance to radiation damage, comparable to Kapton film. © 2004 Elsevier Ltd. All rights reserved.
- Gas micropattern detectors
- Radiation damage