Original language | English |
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Pages (from-to) | 771-774 |
Journal | Vacuum |
Volume | 39 |
Publication status | Published - 1 Jan 1989 |
On the oxide interface microroughness in MOS decives
I. Placencia, J. Suñé, E. Farrés, N. Barniol, X. Aymerich
Research output: Contribution to journal › Article › Research