Novel SU-8 based vacuum wafer-level packaging for MEMS devices

Gonzalo Murillo, Zachary J. Davis, Stephan Keller, Gabriel Abadal, Jordi Agusti, Alberto Cagliani, Nadine Noeth, Anja Boisen, Nuria Barniol

Research output: Contribution to journalArticleResearchpeer-review

20 Citations (Scopus)

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Physics & Astronomy