Nortic-Baltic SPM Workshop. "Fabrication of Nanometer Scale Mechanical Resonators Using Laser AFM Modified Aluminium as a Mask". Nortic-Baltic SPM

G. Abadal, A. Boisen, O. Hansen, S. Bouwstra, F. Grey

    Research output: Book/ReportProceedingResearch

    Original languageEnglish
    Number of pages1
    Publication statusPublished - Jun 1998

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