Original language | English |
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Number of pages | 1 |
Publication status | Published - Jun 1998 |
Nortic-Baltic SPM Workshop. "Fabrication of Nanometer Scale Mechanical Resonators Using Laser AFM Modified Aluminium as a Mask". Nortic-Baltic SPM
G. Abadal, A. Boisen, O. Hansen, S. Bouwstra, F. Grey
Research output: Book/Report › Proceeding › Research