Nordic-Baltic SPM Workshop. "Laser and AFM Lithography on Aluminum- a Fabrication Tool for Nanomechanical Devices". Nordic-Baltic SPM

A. Boisen, K. Birkelun, G. Abadal, Z.J. Davis, O. Hansen, F. Grey, - (Editor)

    Research output: Book/ReportProceedingResearch

    Original languageUndefined/Unknown
    Number of pages1
    Publication statusPublished - Jun 1998

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