Nondestructive anodic bonding test

José A. Plaza, Jaume Esteve, Emilio Lora-Tamayo

    Research output: Contribution to journalArticleResearchpeer-review

    12 Citations (Scopus)

    Abstract

    A new, nondestructive anodic bonding test has been designed. One main factor involved in the anodic bonding process is the level of electrostatic pressure applied. We have designed, fabricated, and tested new test structures to control the electrostatic pressure. The information on the level of electrostatic pressure during the anodic bonding process tells us about the quality of the bond. With this test it is possible to characterize the anodic bonding method and the quality of the processed bonded wafers.
    Original languageEnglish
    JournalJournal of the Electrochemical Society
    Volume144
    Issue number5
    DOIs
    Publication statusPublished - 1 Jan 1997

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