Non-Destructive \i In Situ\i0 Test for Anodic Bonding

J.A. Plaza, J. Esteve, E. Lora-Tamayo

    Research output: Contribution to journalArticleResearch

    10 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)176-180
    JournalSens. actuators, A, Phys.
    Volume60
    Issue number1-3
    Publication statusPublished - 1 Jan 1997

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