New method to improve the accuracy in a sequential lateral shearing interferometer

Josep Vidal, Josep Nicolas, Juan Campos

Research output: Contribution to journalArticleResearchpeer-review

8 Citations (Scopus)

Abstract

© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). We present a new technique for measuring ultraprecise absolute optical surfaces. The technique combines the lateral shearing method but using a Fizeau interferometer. It achieves faster reconstructions than with a deflectometric system and without the influence of the reference surface. The system is limited by the imprecision of the linear stage and those of the estimation of the curvature of the reference surface. Regarding the guidance errors, we propose a new method to estimate pitch and roll based on data redundancy analysis. Numerical simulation results of pitch-and-roll estimations are given for realistic errors. Reconstructions using the sequential lateral shearing are also provided achieving nanometer accuracy.
Original languageEnglish
Article number115601
JournalOptical Engineering
Volume50
DOIs
Publication statusPublished - 1 Nov 2011

Keywords

  • Fourier optics
  • interferometry
  • metrology
  • mirrors

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