New FET accelerometer based on surface micromachining

J. A. Plaza, M. A. Benitez, J. Esteve, E. Lora-Tamayo

    Research output: Contribution to journalArticleResearchpeer-review

    13 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'New FET accelerometer based on surface micromachining'. Together they form a unique fingerprint.

    Physics & Astronomy