New FET Accelerometer Based on Surface Micromachining

J.A. Plaza, M.A. Benítez, J. Esteve, E. Lora-Tamayo

    Research output: Contribution to journal › Article › Research

    13 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)342-345
    JournalSens. actuators, A, Phys.
    Volume61
    Issue number1-3
    Publication statusPublished - 1 Jan 1997

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