Original language | English |
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Pages (from-to) | 342-345 |
Journal | Sens. actuators, A, Phys. |
Volume | 61 |
Issue number | 1-3 |
Publication status | Published - 1 Jan 1997 |
New FET Accelerometer Based on Surface Micromachining
J.A. Plaza, M.A. Benítez, J. Esteve, E. Lora-Tamayo
Research output: Contribution to journal › Article › Research
13
Citations
(Scopus)