A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations show a null cross-sensitivity for the x-and y-detections and a very low-level one for the z-direction (< 1.6%). The structure is similar to a twin-mass structure with two central beams and four lateral beams. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers. © 1998 Elsevier Science S.A. All rights reserved.
|Journal||Sensors and Actuators, A: Physical|
|Publication status||Published - 1 Apr 1998|
- Triaxial accelerometers