New bulk accelerometer for triaxial detection

J. A. Plaza; Hong Chen; J. Esteve; Emilio Lora-Tamayo

doi:10.1016/S0924-4247(97)01735-4

New bulk accelerometer for triaxial detection

J. A. Plaza, Hong Chen, J. Esteve, Emilio Lora-Tamayo

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Abstract

A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations show a null cross-sensitivity for the x-and y-detections and a very low-level one for the z-direction (< 1.6%). The structure is similar to a twin-mass structure with two central beams and four lateral beams. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers. © 1998 Elsevier Science S.A. All rights reserved.

Original language	English
Pages (from-to)	105-108
Journal	Sensors and Actuators, A: Physical
Volume	66
Issue number	1-3
DOIs	https://doi.org/10.1016/S0924-4247(97)01735-4
Publication status	Published - 1 Apr 1998

Keywords

BESOI
Non-linearity
Piezoresistive
Triaxial accelerometers

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10.1016/S0924-4247(97)01735-4

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title = "New bulk accelerometer for triaxial detection",

abstract = "A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations show a null cross-sensitivity for the x-and y-detections and a very low-level one for the z-direction (< 1.6%). The structure is similar to a twin-mass structure with two central beams and four lateral beams. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers. {\textcopyright} 1998 Elsevier Science S.A. All rights reserved.",

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AU - Esteve, J.

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N2 - A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations show a null cross-sensitivity for the x-and y-detections and a very low-level one for the z-direction (< 1.6%). The structure is similar to a twin-mass structure with two central beams and four lateral beams. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers. © 1998 Elsevier Science S.A. All rights reserved.

AB - A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations show a null cross-sensitivity for the x-and y-detections and a very low-level one for the z-direction (< 1.6%). The structure is similar to a twin-mass structure with two central beams and four lateral beams. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers. © 1998 Elsevier Science S.A. All rights reserved.

KW - BESOI

KW - Non-linearity

KW - Piezoresistive

KW - Triaxial accelerometers

U2 - 10.1016/S0924-4247(97)01735-4

DO - 10.1016/S0924-4247(97)01735-4

M3 - Article

VL - 66

SP - 105

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New bulk accelerometer for triaxial detection

Abstract

Keywords

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