New bulk accelerometer for triaxial detection

J. A. Plaza, Hong Chen, J. Esteve, Emilio Lora-Tamayo

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    30 Citations (Scopus)

    Abstract

    A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations show a null cross-sensitivity for the x-and y-detections and a very low-level one for the z-direction (< 1.6%). The structure is similar to a twin-mass structure with two central beams and four lateral beams. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers. © 1998 Elsevier Science S.A. All rights reserved.
    Original languageEnglish
    Pages (from-to)105-108
    JournalSensors and Actuators, A: Physical
    Volume66
    Issue number1-3
    DOIs
    Publication statusPublished - 1 Apr 1998

    Keywords

    • BESOI
    • Non-linearity
    • Piezoresistive
    • Triaxial accelerometers

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