Abstract
A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations show a null cross-sensitivity for the x-and y-detections and a very low-level one for the z-direction (< 1.6%). The structure is similar to a twin-mass structure with two central beams and four lateral beams. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers. © 1998 Elsevier Science S.A. All rights reserved.
Original language | English |
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Pages (from-to) | 105-108 |
Journal | Sensors and Actuators, A: Physical |
Volume | 66 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 1 Apr 1998 |
Keywords
- BESOI
- Non-linearity
- Piezoresistive
- Triaxial accelerometers