Original language | English |
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Title of host publication | Libro de abstracts de la 4a Conferencia de dispositivos electrónicos, Calella-Barcelona, 12-14 febrero 2003 |
Place of Publication | Calella (ES) |
Pages | 97- |
Edition | 1 |
Publication status | Published - 1 Jan 2003 |
Nanopatterning by AFM-nanooxidation of thin aluminium layers as a tool for the prototyping of nanoelectromechanical systems
F. Pérez-Murano, Z. Davis, E. Forsen, M. Dong, J. Montserrat, G. Abadal, C. Martín, X. Borrisé, A. Boisen, N. Barniol
Research output: Chapter in Book › Chapter › Research