Nanopatterning by AFM-nanooxidation of thin aluminium layers as a tool for the prototyping of nanoelectromechanical systems

F. Pérez-Murano; Z. Davis; E. Forsen; M. Dong; J. Montserrat; G. Abadal; C. Martín; X. Borrisé; A. Boisen; N. Barniol

Nanopatterning by AFM-nanooxidation of thin aluminium layers as a tool for the prototyping of nanoelectromechanical systems

F. Pérez-Murano, Z. Davis, E. Forsen, M. Dong, J. Montserrat, G. Abadal, C. Martín, X. Borrisé, A. Boisen, N. Barniol

National Microelectronics Centre

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	Libro de abstracts de la 4a Conferencia de dispositivos electrónicos, Calella-Barcelona, 12-14 febrero 2003
Place of Publication	Calella (ES)
Pages	97-
Edition	1
Publication status	Published - 1 Jan 2003

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Cite this

Pérez-Murano, F., Davis, Z., Forsen, E., Dong, M., Montserrat, J., Abadal, G., Martín, C., Borrisé, X., Boisen, A., & Barniol, N. (2003). Nanopatterning by AFM-nanooxidation of thin aluminium layers as a tool for the prototyping of nanoelectromechanical systems. In Libro de abstracts de la 4a Conferencia de dispositivos electrónicos, Calella-Barcelona, 12-14 febrero 2003 (1 ed., pp. 97-).

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author = "F. P{\'e}rez-Murano and Z. Davis and E. Forsen and M. Dong and J. Montserrat and G. Abadal and C. Mart{\'i}n and X. Borris{\'e} and A. Boisen and N. Barniol",

year = "2003",

month = jan,

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Pérez-Murano, F, Davis, Z, Forsen, E, Dong, M, Montserrat, J, Abadal, G, Martín, C, Borrisé, X, Boisen, A & Barniol, N 2003, Nanopatterning by AFM-nanooxidation of thin aluminium layers as a tool for the prototyping of nanoelectromechanical systems. in Libro de abstracts de la 4a Conferencia de dispositivos electrónicos, Calella-Barcelona, 12-14 febrero 2003. 1 edn, Calella (ES), pp. 97-.

Nanopatterning by AFM-nanooxidation of thin aluminium layers as a tool for the prototyping of nanoelectromechanical systems. / Pérez-Murano, F.; Davis, Z.; Forsen, E. et al.
Libro de abstracts de la 4a Conferencia de dispositivos electrónicos, Calella-Barcelona, 12-14 febrero 2003. 1. ed. Calella (ES), 2003. p. 97-.

Research output: Chapter in Book › Chapter › Research

TY - CHAP

T1 - Nanopatterning by AFM-nanooxidation of thin aluminium layers as a tool for the prototyping of nanoelectromechanical systems

AU - Pérez-Murano, F.

AU - Davis, Z.

AU - Forsen, E.

AU - Dong, M.

AU - Montserrat, J.

AU - Abadal, G.

AU - Martín, C.

AU - Borrisé, X.

AU - Boisen, A.

AU - Barniol, N.

PY - 2003/1/1

Y1 - 2003/1/1

M3 - Chapter

SN - 978-84-607-6771-8

SP - 97-

BT - Libro de abstracts de la 4a Conferencia de dispositivos electrónicos, Calella-Barcelona, 12-14 febrero 2003

CY - Calella (ES)

ER -